节点文献
微电子用聚酰亚胺亚胺化峰
The Imidizing Peak of Polyimide Used in Microelectronics
【摘要】 介绍了高分子聚合物聚酰亚胺的亚胺化原理和实用的方法,实验发现薄膜材料红外吸收峰800cm-1,的强弱与亚胺化程度有关;给出的判别与计量方法能确定材料的亚胺化程度。
【Abstract】 The principle and practical methods of imidization of polymer polyimide are described.Ithas been found by experiment that the strength of infrared absorption peak of the films atabout 800 cm-1 depends on the degree of imidization. Measuring methods for determining thedegree of imidization useful to industrial production of microelectronic devices and large-scaleintegrated circuits are given.
- 【文献出处】 华中理工大学学报 , 编辑部邮箱 ,1995年03期
- 【分类号】TN305
- 【被引频次】11
- 【下载频次】116