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有机金属沉积法生长HgCdTe双色晶膜材料的研究
DOUBLE WAVE BAND HgCdTe CKYSTAL LAYER GROWN BY MOCVD
【摘要】 本文采用有机金属沉积(MOCVD)法在CaAs衬底上率先开展生长双色HgCdTe材料的研究,总结了生长CdTe缓冲层和隔离层、x≈0.2、x≈0.3的HgCdTe晶膜的工艺条件,并给出了HgCdTe双色材料的组分均匀性、厚度、表面形貌、结构和电性能。
【Abstract】 In this paper it is reported the pineering work of growing doublewaveband HgCdTe layer on the base of GaAs by MOCVD. The tech-niques of creating CdTe buffering and isolating areas and producing the HgCdTe crystal layer when x≈ 0.2 or x≈0.3 are discussed,and the specifications of mate-rial composition and its homogeneity,thickness,surface looking,structure,and electric characteristics are presented.
- 【文献出处】 红外与激光技术 , 编辑部邮箱 ,1995年06期
- 【分类号】TN215
- 【下载频次】21