【摘要】 利用红外光弹系统，采用森纳蒙特（Ｓｅｎａｒｍｏｎｔ）补偿法，对功率整流管制备过程中扩散和镀镍工艺所引入的残余应力进行了测量和讨论．获得扩硼铝、扩磷和镀镍硅片中的应力值，并给出了残余应力在硅衬底片中的分布图．更多还原

【Abstract】 With the help of infrared photoelatic system,the residual stress induced by diffusion and nickelage process in the fabrication of power rectifier was measured and analyzed. The residual stress and stress distribution of diffusing boron-aluminium, diffusing phosphorus and plating nickel in silicon wafer were obtained by using the Senarmont compensation method.更多还原