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碳热合成Si₃N₄粉工艺中的热力学初探

STUDY OF THERMODYNAMICS IN THE SYNTHESIS OF Si₃N₄ POWDER BY CARBOTHERMAL REDUCTION

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【Author】 Qiu Tai Materials Science and Engineering Department,Nanjing University of Chemical Technology,Nanjing 210009.;He Xuchu; Xu Jie; Li Yuanqiang(Nanjing University of Chemical Technology)

【机构】南京化工大学；

【摘要】通过ＳｉＯ＿２－Ｃ－Ｎ＿２系统的热力学计算，表明碳热合成Ｓｉ＿３Ｎ＿４粉温度应控制在１３５０～１３７０℃。气体分压变化对Ｓｉ＿３Ｎ＿４粉的合成影响较大。应控制ＳｉＯ分压为１０￣（－６）～１０￣（－６．５）ＭＰａ，ＣＯ分压低于１０￣（－３）ＭＰａ，Ｏ＿２分压低于１０￣（－２２）ＭＰａ。Ｎ＿２分压的提高有利于提高合成温度。更多还原

【Abstract】 The thermodynamics calculation of the SiO₂-C- N₂ system shows that the temperature should becontrolled in the range of 1350～1370℃in the carbothermal synthesis of Si₃N₄ powder,The partial pressure ofgas has significant influence upon the synthesis. Thus,the partial pressures of SiO should be controlled between10￣（-6） MPa and 10￣（-6.5） MPa, and the partial pressures of CO, O₂ below 10￣（-3） MPa and 10￣（-22）MPa, respectively. In-crease of N2 partial pressure is beneficiaI to promote the synthesis temperature.更多还原