【摘要】 偏振相位调制方法是测量微小双折射的一种高精度检测方法。本文系统全面地分析了以ＰＭＣＳＡ结构形式测量光盘盘基应力双折射的相位调制方法中，由各种误差源造成的对测试结果的影响。更多还原

【Abstract】 olarized phase-modulation method is used to measure small birefringence with high precision. The effects on measuring results caused by some kinds of error sources in this method using PMCSA form for measuring opticaloisk substrate are analyzed. Results ontuined show that the presision is within 0. 03 nm.更多还原