【摘要】 利用全息光刻和离子束刻蚀技术制作了用于软Ｘ射线聚焦和色散的三种参数的高精度菲涅耳（Ｆｒｅｓｎｅｌ）波带片，给出了实验结果。更多还原

【Abstract】 oft x-ray condenser zone plates with three kinds of parameters are fabricated by holograph-ion beam etching technique. Zone plate condensers are used in our soft xray microscopy experiments which act in combination with a pinhole as a linear monochromator.更多还原