【摘要】 研制成功了一台使用光学偏转法检测的原子力显微镜，通过对云母、光栅、光盘等样品的观测证明仪器达到原子分辨率，最大扫描范围可达７μｍ×７μｍ。文中将对这台原子力显微镜的原理、结构及一些应用结果进行讨论。更多还原

【Abstract】 An atomic force microscope based on the optical level detection method hasbeen developed and atomic resolution is achieved. The scanning range is 7 Urn × 7 μm.images of mica. optical grating and compact stamper are shown. In this paper thetheory,construunction and experiment results are described.更多还原