【摘要】 本文介绍了近十年来，各国科学家在研究扫描力显微镜的过程中所采用的各种超微力（１０￣（－８）～１０￣（－１０）Ｎ）传感器的探测方法。评述了各种方法的灵敏度，抗振性，使用范围，操作方式和各自的优缺点。并对最近出现的几种新的探测方法作了说明。更多还原

【Abstract】 In this paper,some detection methods of Super-micro force sensor used in researchingscanning force microscopy are introduced,and their sensitivity,anti-viberation,operationscope,operation method,advantages and disadvantages are evaluated,and several new detection methods are illustrated.更多还原