【摘要】 多晶硅有源矩阵液晶显示技术，特别是一体化多晶硅有源矩阵液晶显示技术以它独特的优点，越来越受到重视，并将在液晶显示领域中占有重要地位。但是，多晶硅有源矩阵液晶显示技术还存在一些问题，这也正是目前研究的主要内容，本文对低温下淀积高质量多晶硅薄膜技术；通过退火使非晶硅结晶为多晶难技术；器件层转移技术；钝化技术；一体化技术以及多晶硅有源矩阵液晶显示的前景等进行了分析和讨论。更多还原

【Abstract】 Poly-Si TFTs have alfeady been used in active matrix liquid crystal display (AMLCD). The integration of part driving circuits on to the same substrate is one of the main goals of the development of Poly-Si AMLCD. However AMLCD based on poly-Si TFTs has some problems. The main technology of poly-Si TFTs,such as depositing poly Si thin film at low temperature, recrystalline amorphous silicon, hydrogenation are dis cussed ;the active inatrix device layer transfer technology and the on-chip integrated driver circuits for AMLCD are introduced.更多还原