【摘要】 对XASM-800型多功能表面分析系统扩散泵冷却进行了改进,克服了使用中突然停电引起仪器系统的污染,并介绍了受污染仪器的清洗和离子抢枪心的改进与修复等。更多还原

【Abstract】 Improvement of cooling water system for oil diffusion pump of XASM-800 multi-technical surface analysis system to avoid the instrument pollution in case of accidental power interruption was reported. Method for elimination of the pollutants from the instrument and restoration of ionic gun were also described in this paper.更多还原