【摘要】 本文采用激光诱导大分子有机硅熔（ＨＭＤＳ）气相反应，通过加入附加反应气和工艺参数的优化控制，在不同合成条件下制得单相非晶Ｓｉ３Ｎ４，β—ＳｉＣ纳米粉和宽组份变化范围的ＳｉＮＸＣＹ纳米复合粉（平均粒径：１０－３０ｎｍ）。与通常采用的硅烷相比，采用此有机硅烷激光合成在等同实验条件下粉产率可提高３－５倍．成本降低１倍，且具有粉体组成，结构易于控制等优点，是一种具有商业化应用前景的高性能硅基纳米陶瓷粉制备技术。更多还原

【Abstract】 Si-base ceramic nano-powders including Si3N4, SiC,Si3N4-SiC have been successfully prepared from hexamethyldisilazane(HMDS) and NH3 or H2 by CO2 laser induced gas phase reaction with high-yield. The cost decrease by 6-10 times using HMDS as the raw material compared with SiH4 and the chemical composition, size, structure of powders were controlled easily. This synthesis technology can be applied in ceramic nano - powders industry in the recent times.更多还原