【摘要】 在熔融石英玻璃衬底上，通过注入氮离子和硼离子，制成了低损耗、单模平面光波导．波导的最大折射率和离子浓度分布的半宽度分别是１．４８和０．５μｍ，波导损耗＜０．１ｄＢ／ｃｍ．更多还原

【Abstract】 The low-loss single mode waveguides in fused quartz substrate were fabricated by nitrogen and boron ion implantation.The maximum index and half width of refractive index profile is 1.48 and 0.5 μm,respectively.The waveguide loss is less than 0.1 dB/cm.更多还原