【摘要】 本文介绍了一种可以测量局部等离子体电子密度的微波共振探针法，并给出了它的测量原理、设计方法和实验结果。实验结果表明：由于微波共振探针不受鞘层的影响，因此它比通常的朗谬静电探针对等离子体密度的测量要精确得多。微波共振探针的空间分辨率与它的几何尺寸有关。更多还原

【Abstract】 A microwave resonator probe method for diagnosing local plasma electron density is described,and the measurement principle,design method and experiment results are included. The experimental results show that the microwave resonator probe is much more reliable than Langmuir probe in the measurement of plasma density due to its completeness. The spatial resolution depends upon the size of microwave resonator probe.更多还原