【摘要】 解决真空微电子器件的稳定性和寿命问题，可以扩大场致发射器件的应用范围。本文概述了影响真空微电子场致发射阴极阵列（ＦＥＡ）发射稳定性的几个因素，认为阴极材料和功函数是决定真空微电子器件发射稳定性的主要因素。最后提出了解决发射稳定的几个建议。更多还原

【Abstract】 One of the important issue to be considered for the use of vacuum microelectronicsdevices is the emission stability and reliability of vacuum microelectronics devices.Some of the fac-tors that can influence the emiseion stability of the field emission arrays,the material and work func-tion of the FEAs,which are the key factors,shold be considerd for the vacuum microelectronicsdevices. Several resolution to the emission stability are put forward.更多还原