【摘要】 为了提高超导薄膜红外探测器的工作带宽、响应速度和灵敏度，并便于进行集成平面工艺，设计了微桥型红外敏感元及与其耦合的领结型平面天线（ｂｏｗ—ｔｉａａｎｔｅｎｎａ），其检测波长范围可从中红外到毫米波段，理论估算其ＮＥＰ值可达１．２×１０（－１２）ＷＨＺ，响应时间τ≤１０（－６）Ｓ。更多还原

【Abstract】 In order to improve the sensitivity and response time of high Tc superconduction thin film infrared detector, a desigh of bow-tia was performed .The analysis shows that a noise equivalent power of 1.2 ×10(-12) Whz is achievable by broadening the wavelength and response time τ～1×10(-6)S.更多还原