【摘要】 从理论上对圆光栅的特性进行了分析及精确计算，设计出了光刻伺服磁盘两级定位系统位置传感器的执行机构及检测电路。该传感器既可以应用于实际的磁盘定位系统，也可以做进一步的改进，成为磁盘定位系统的专用性能测试装置。更多还原

【Abstract】 Through analyzing the characters of circular grating and accurate calculation in theory,this paper suggested the executing mechanism and the measuring curcuit of the position sen-sor of the dual-stage position fixing system in the etched-servo disk. This sensor can be ap-plied in the practical disk position fixing system, and will be a special testing apparatus ofthe system after a further improvement.更多还原