【摘要】 片状气体放电电子束强度与能量分布的实验研究罗宗南，崔一平，陈松生，杨正名（东南大学电子工程系．南京２１００１８）气体放电电子束强度高，能量大，在微电子、光电子、加工、材料科学、等离子化学以及表面处理等方面有着广泛的应用前景，加以成本低廉、操作方便，是...更多还原

【Abstract】 A new modified Faraday cup is designed,for measuring energy spectrum it cal effectively limit the uifluence of the parasitic plasma and ionization generated inside the detector by beam itself.Results show that the component of high energy electron is major in the beam,and with the pressuregetting lower the beam energy growthes,the compenent of high energy electrons inereases,The beamintensity along the width is uniform but beam profile acrase beam width is Gaussian profile.更多还原