【摘要】 研究了三极溅射法制备的ＴａＮ膜的结构、成分及其性能。实验发现：随着氮分压的增加，ＴａＮ膜的结构将从面心立方相转变为六方相；ＴａＮ膜的显微硬度在单一相结构时最大，而以双相共存时的显微硬度较低。更多还原

【Abstract】 The structure,composition and properties of TaN films deposited by a triode-sputtering ion plate are investigated.A phase transition from fcc TaN to hexagonal TaN with anincrease in the nitrogen partial pressure is observed.The microhardness of TaN film with singlephase is higher than that with fcc and hexagonal phases coexisting.更多还原