【摘要】 微波等离子体的研究已有三十多年的历史,近十年来的研究已使微波等离子体技术扎根于高技术新材料领域中。讨论了陶瓷微波等离子烧结技术、MPCVD制备金刚石薄膜和光导纤维、微波ECR制备纳米固体薄膜和微波刻蚀技术等。更多还原

【Abstract】 Microwave-induced plasma technology has developed formore than 30 years,more and more applications in high-tech advanced material research have been discovered in recent ten years. Recent developments of microwave-induced plasma sintering, diamond film and optical fibre prepared by MPCVD, nanometre scale solid film prepared by microwave ECR and microwave etching technique have been reviewed in this paper.更多还原