【摘要】 设计了一种材料为金属镍的摆动式(WObble)微型静电马达,马达转子直径140μm,厚度8μm,外观总体尺寸1 mm×1 mm.此马达首先是在硅衬底上利用准LIGA技术电镀形成,然后利用RIE释放.文中给出了微型摆动式静电马达的设计思想和制作工艺,并对工艺及马达驱动中出现的一些问题进行讨论.更多还原

【Abstract】 Abstrcut A new design of a nickle electrostatic wobble micromotor is reported. The di-ameter and the thickness of the rotor are 140 μm and 8 μm respectively, the whole sizeof the motor is 1 mm × 1 mm. The motor is first electroplated on wafer by means ofquasi-LIGA technology and then released by RIE. The design and the fabricating pro-cess of the electrostatic wobble micromotor have been given, some discussions about theproblems which appeared in the processes of the fabricating and driving are included.更多还原