节点文献
铂薄膜电阻器件表面保护的研究
Study on surface protection of film platinum resistor
【摘要】 合成了用于铂薄膜电阻器件表面保护的材料,并研究了它对器件电学性能的影响。
【Abstract】 The material that used to preserving the surface of film platimum resistor had been synthesized,and the influence of the materical to the electrical property of resistor had been studied.
- 【文献出处】 表面技术 ,Surface Technology , 编辑部邮箱 ,1995年01期
- 【分类号】TG174.4
- 【被引频次】3
- 【下载频次】118