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Ga-In-As-Sb系合金固-液平衡和人工神经网络预报

Solid-Liquid Equilibrium of Ga-In-As-Sb System and Artificial Neural Network Prediction

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【作者】 严六明; 吴伟; 张靖巍; 陈念贻; 彭瑞伍;

【Author】 Yan Liuming; Wu Wei; Zhang Jingwei; Chen Nianyi and Peng Ruiwu (Shanghai Institute of Metallurgy, The Chinese Academy of Sciences, Shanghai 200050)Received 16 November 1993, revised manuscript received 6 January 1994

【机构】 中国科学院上海冶金研究所;

【摘要】 本文用DTA法测量了Ga-In-As-Sb系合金的液相线温度,并用滑舟法在Gash衬底上生长液相外延膜,并用电子探针法分析膜的成分.在此基础上利用实验数据和文献数据训练人工神经网络模型,神经网络模型用交叉检验法测试是否过拟合.经测试合格的神经网络可以预报液相线温度和外延层组成.

【Abstract】 Abstract Measurement and computer prediction of the Ga-In-As-Sb solid-liquid equilibrium are reported. The liquidus data are obtained by DTA, and the solidus data are determined by liquid phase epitaxial method. The artificial neural networks,trained by use of experimental data,can be used to predict liquidus and solidus data. And cross-validation method is also employed to get rid of overfitting.

  • 【文献出处】 半导体学报 ,CHINESE JOURNAL OF SEMICONDUCTORS , 编辑部邮箱 ,1995年08期
  • 【分类号】TP183
  • 【下载频次】27
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