【摘要】 从自扫描光电二极管列阵（ＳＳＰＡ）的工作原理出发，提出采用外延、离子注入、推阱的技术，研究一种新颖的高响应度的ＰＩＮ结构的ＳＳＰＡ器件，详细的分析了工艺设计方案和实验方法，最后提供了样品的测试参数。更多还原

【Abstract】 The operation principle of self-scanned photodiode array(SSPA) is described firstly in this paper. By employing the epitaxy ,ion implantation and diffusion technologies ,we have fabricated a new type of SSPA device with PIN structure which has high responsibility. Process design and experimental methods are discussed in detail. The measured parameters of this type of device sample are obtained in the end of the paper.更多还原