【摘要】 介绍了利用交流电桥和相敏检波（PSD）原理设计的薄膜电容真空计电源的电路实施方案、主机电路结构和实测性能，对其中关键的小电容测量方法进行了深入的研究，在8h内测量，电容差值的漂移可小至10－3pF。主机结构采用微机控制和真空计模块化设计，可构成复合真空计或用于组装其他真空计。初步测试结果表明，这种真空计用单规管可以实现从大气至1Pa，覆盖五个数量级的真空度测量。更多还原

【Abstract】 A new capacitance diaphragm vacuum-meter electronics which based on AC bridge and PSD technique is described in detail with it’s circuit configuration and performance. As a key part of this vacuummeter,the low capacitance measurement circuit is discussed and designed carefully,and the measured drift is less then 10-3pF in 8h. The micro-computer controlled and modular designed host circuit can be used to construct a multi-gauge vacuum meter or other kinds of vacuum meters. The tested results show that the new vacuum meter electronics is suitable for vacuum measurement ranging from atmosphere to 1Pa by a single gauge.更多还原