【摘要】 介绍用磁控溅射制作的从大气往真空约覆盖5个量程的“绝对型”电容薄膜真空规，以及与该真空规配套的真空计的电路。该真空计测量范围为1．3～105Pd，真空规与电容信号检测电路置于同一金属壳内，以避免外界干扰。规的恒温胜温度波动小于±0．1℃，有效地降低了温度的影响。电路的非线性小于0．4％，高真空下北输出漂移小于0．1％，在13～105Pa各量程内，最大校准误差小于读数的4％。更多还原

【Abstract】 This paper introduces an absolute capacitance diaphragm gauge which is made using magnetron sputtering, and the measurement circuits attached to it. The measurement range of this gauge is from 1.3Pa to 105Pa (1×10(-2) ~760 Torr) which covers five stages. The gauge and the capacitance signal detection circuits are placed inside one metal shell to avoid disturbance from the outside. The temperature fluctuation inside the thermostat is less than±0.1℃, thus the influence of temperature is effectively reduced. The non-linearity of the circuits is less than 0.4% and the ouput drift under high vacuum condition is less than 0.1% R. The relative error is less than 4% R in measuring pressure ranging from 13 Pa to 105Pa.更多还原