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激光脉冲和工件参数对激光微孔加工质量的影响

Effect of Laser Pulse and Workpiece Parameters on Microhole Quality in Laser drilling

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【作者】 晏绪光高文斌杨水其裘明信

【Author】 Yan Xuguang;Gao Wenbin;Yang Shuiqi;Qiu MingXin(HangZhou Institute of Electronic Engineering, HangZhou 310037)

【机构】 杭州电子工业学院

【摘要】 研究了激光功率、重复频率、焦点位置以及光束质量对激光打孔质量的影响。通过调整和优化激光脉冲、聚焦光学系统和工件参数,在0.1~2mm厚的不同材料上打出孔径0.06~0.2mm的精密小孔。利用TEM00模激光脉冲和望远镜扩束后再聚焦的办法,加工出孔径25~30mm的微孔。

【Abstract】 We have studied the effect of the laser powerg the repeat frequency, focus setting,as well as the optical beam quality on the laser drilling quality. A precision microhole of bore diameter 0.06~0 .2mm on the various materials of thickness 0.1~2mm can be drilled through by optimal adjusting and selecting the parameters of the laser pulses, the optical focus system and the workpiece. A microhole of bore diameter 25~30μm has been drilled by using a telescope to enlarge the beem diameter of TEM00-mode YAG laser pulses and focusing these pulses.

【关键词】 激光打孔微孔参数优化
【Key words】 laser drillingmicroholeoptimum of parameters
  • 【分类号】TG665
  • 【被引频次】43
  • 【下载频次】419
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