【摘要】 研究了激光功率、重复频率、焦点位置以及光束质量对激光打孔质量的影响。通过调整和优化激光脉冲、聚焦光学系统和工件参数，在０．１～２ｍｍ厚的不同材料上打出孔径０．０６～０．２ｍｍ的精密小孔。利用ＴＥＭ００模激光脉冲和望远镜扩束后再聚焦的办法，加工出孔径２５～３０ｍｍ的微孔。更多还原

【Abstract】 We have studied the effect of the laser powerg the repeat frequency, focus setting,as well as the optical beam quality on the laser drilling quality. A precision microhole of bore diameter 0.06～0 .2mm on the various materials of thickness 0.1～2mm can be drilled through by optimal adjusting and selecting the parameters of the laser pulses, the optical focus system and the workpiece. A microhole of bore diameter 25～30μm has been drilled by using a telescope to enlarge the beem diameter of TEM00-mode YAG laser pulses and focusing these pulses.更多还原