【摘要】 利用激光的热效应使聚酰亚胺上的醋酸钯膜分解，得到直接镀覆的金属铝线，讨论了激光波长、扫描速率等因素对钯沉积层的影响，并对该沉积层进行了分析测试．更多还原

【Abstract】 Palladium was deposited in lines on the polyimide substrate from coated palladiumacetate under Ar￣+ and He-Ne laser irradiation.The influence of laser power and scan speedon the state of the deposited palladium lines has been examined.The composition of the de-posited palladium was analyzed by AES and XPS techniques.The palladium lines showed agood adhesion on the polyimide substrate.更多还原