【摘要】 介绍一种新的真空弧沉积实验装置。在１５～４０Ａ的电流范围内，对Ａ１弧等离子体的特性进行了初步诊断。在２５Ａ弧电流下，电子温度为０．４～０．８ｅＶ，电子浓度为１０１５～１０１７ｍ－３。更多还原

【Abstract】 A new vacuum arc deposition experimental device is intreduced in this paper.The properties ofAl arc plasma generated by anodic vacuum arc are investigated preliminarily in the current rangebetween 15 and 40A. The electron temperature range is within 0.4～0.8eV and the electron densi-ty is within 1015～1017m-3 at 25A arc current.更多还原