【摘要】 本文提出一种双频激光三尺组合法直线度测量系统。理论分析及实验结果都说明本系统可望获得优于0.1μm/m的精度,是提高现有直线度测量精度的一个较实用的方法。更多还原

【Abstract】 The double- frequency straightnees measurement system of three straightedge pairs is put forward here. Theoretical analysis and experimental results show that the accuracy of the system is better than 0. lum/m. It is one of the practical ways of improving straightness measurement accuracy.更多还原