【摘要】 本文阐述了用溶胶一凝胶法制备锆钛酸铅（ＰＺＴ）铁电薄膜的工艺参数对薄膜结构的影响。实验表明，采用合适的工艺参数能制备出具有钙钛矿型结构的ＰＺＴ铁电薄膜。更多还原

【Abstract】 This paper formulated the influence of Sol-Gel process parameters on structure of PZT ferroelectric thin film.The experiments show that the PZT ferroelectric thin film with pe-roskite structure can be produced using reasonable process parameters.更多还原