【摘要】 本文介绍了一种具有高速消隐和可变束流的二级透镜聚焦离子束（ＦＩＢ）系统的设计原理和方法。在这种新的二级透镜ＦＩＢ系统中，采用了束径束流的双工作模式和一种新的电可调无级可变束径束流方案，使二级系统既可用于需要大束流的ＴＯＦ─ＳＩＭＳ和刻蚀粗加工，又可用于需要小束径的高分辨扫描离子显微镜和刻蚀精加工以及ＦＩＢ暴光、变蚀等其它微细加工。设计中提出了逐级可测试性设计原则，解决了多级系统中对中调整和测试的困难。计算了透镜系统的离子光学性能和各种参数对束径束流的影响。最后对系统进行了初步的调试，束斑达到０．１μｍ，得到了预期的结果。更多还原

【Abstract】 The design principle and method of the two-lens focused ion beam (FIB)systern with high speed beam blankig and continuously variable beam current is described,In the two-lens system, the two beam-diameter/current modes are adopted and the continuous variat ion of beam diameter and current has been acheived by means of electrical adjustment, which widely broadens the applica-tion fields of the system,We propose the concept of alignment stage by stage,and the difficuity of alignment in multi-lens system has been overcomed,The influence of power supplies parameters on characteristics of lenses and beam diameter and current were calculated. Finally, the new designed two-lens system has been installed and adjusted,the beam spot size of 0.1μm is obtained and the design idea is examined更多还原