【摘要】 建立了一台简单实用的单级透镜聚焦离子束（ＦＩＢ）系统。该系统采用优越的Ｃａ￣＋液态金属离子源（ＬＭＩＳ）和单级Ｏ－Ｓ透镜，在束能为２０ｋｅＶ、束流为３００ｐＡ时，束径达到０．３μｍ。改进了束斑的测量方法。研究了影响束斑的各种因素。该系统既可用来作为扫描离子显微镜，又可作为亚微米加工工具。文中给出了在该系统上得到的样品显微图像和刻蚀图形的结果。更多还原

【Abstract】 A simple and practical single-lens focused ion beam(FIB)System has been built.Owing to the supeiior property of Ga￣+ liquid metal ion source(LMIS)and fine designed single stage O-S lens,the beam spot size waS reduced to 0.3μm with 300pA beam current at 20keV beam energy,The method of beam spot size measurement has been improved and the factore in fluencing the beam size were studied by both calculations and experi ments,The system can be nsed either as a scanningion microscopy or as a sub-micron fabrication tool。Examples of micro-imaging and micro-machinning are presented.更多还原