【摘要】 研究了电极材料（Ｐｔ／Ｔｉ）对铁电ＰＬＺＴ（７．５／６５／３５）陶瓷薄膜结构和性能的影响．认为在Ｐｔ层厚度一定时，Ｔｉ层的厚度对铁电薄膜的结构和性能有显著影响．当Ｔｉ层过厚或过薄时，铁电薄膜的结构较差；而当Ｔｉ层的厚度适中时，则铁电薄膜的显向下微结构均匀，电性能较好，典型的剩余极化强度和矫顽场分别为２７．８μＣ·ｃｍ￣（－２）和６５．１ｋＶ·ｃｍ￣（－１）．更多还原

【Abstract】 The effect of electrode materials on the structure and electric properties offerroelectric PLZT(7.5/65/35)ceramic thin films has been investigated.It hasbeen shown that,for a certain thickness of the Pt laver,the thickness of the Tilayer has a dominant effect on the structure and electric properties of theferroele-ctric thin films.When the Ti layer was too thick or too thin,PLZT thin filmshad undesireable crystalline structure. However,with appropriate thickness of theTi layer,ferroelectric thin films of good microstructure and electric properties canbe obtained, with typical remanent polarization 27.8μ C·cm￣(-2)and coercive field65.1kV·cm￣(-1), respectively.更多还原