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气相反应法合成超细粉末过程中的r~*叶和晶型的研究
The Study of Critical Nucleus Radius r ̄* and Crystallinity of Ultrafine Powders Synthesized by CVD
【摘要】 本文以SiCl4-NH3、SiCl4-O2、SiCl4-N2-H2、TiCl4-NH3-H2、TiCl4-N2-H2、TiCl4-O2、AlCl3-O2等为体系,运用均匀成核理论,研究了平衡常数Kp、过饱和比S及临界核半径,r*等因素对气相反应法中超细粉末的形成及粉末结构状态的影响.结果表明,当2r*大于某物质的晶格常数时,用气相反应法得到的该物质的超细粉末一般为晶体粉末,反之则得到无定形粉末.
【Abstract】 Homogeneous nucleation and particle growth of the SiCl4-O2, TiCl4-NH3-H2, TiCl4-N2-H2, TiCl4O2, AlCl3-O2 system have been studied in this paper. The effect of Kp, S, r* on the formation and the crystallinity of ultrafine powders have been discussed. It was indicated that while the 2r* was larger than the amounts of the lattice parameter of individual material the powders were preferred to form crystalline state and vice versa.
【关键词】 气相反应;
平衡常数;
过饱和比值;
临界核半径;
粉末结构状态;
【Key words】 vapor phase reaction; supersaturated ratio; critical nucleus radius; crystallinity;
【Key words】 vapor phase reaction; supersaturated ratio; critical nucleus radius; crystallinity;
【基金】 中国自然科学基金
- 【文献出处】 无机材料学报 ,JOURNAL OF INORGANIC MATERIALS , 编辑部邮箱 ,1994年03期
- 【分类号】O742.4
- 【被引频次】12
- 【下载频次】57