【摘要】 采用石英毛细管柱与氩检测器相联结的气相色谱方法定量检测高纯的光纤原料四氯化硅中微量三氯氢硅等含氢杂质。该方法简单、可靠，三氯氢硅的检测下限达０．１×１０￣（－６）Ｗ／Ｗ。更多还原

【Abstract】 GC method for detemining trace SiHCl₃ in high purity SiCl₄ has been developed. The methed,using afused sinica capillary column for separation and a sensitive argon detector for quantitative determination of someimpurities of ppm level,is simple, stable and reliable. the minimum detectable concentration was 0.1 ppm forSIHCl₃. This GC system is resisting to corrosion of the sample in the long run.更多还原