【摘要】 用Ｘ射线衍射分析研究了氮分区对ＰＥＭＳＩＰ法ＴｉＮ涂层相组成的影响，结果表明，随着氮分压增加，涂层相组成朝着富氮相及其含量增加的方向发展，变化趋势为：αＴｉ→（αＴｉ＋Ｔｉ２Ｎ）→（Ｔｉ２Ｎ＋ＴｉＮ）→ＴｉＮ。氮分压对涂层硬度的影响主要是由氮分压影响涂层相组成而引起的，其中，由Ｔｉ２Ｎ和ＴｉＮ两相组成的膜硬度最高。更多还原

【Abstract】 The influence of N2 partial pressure on the component phases of TiN coatings deposited by PEMSIP has been investigated by means of X ray diffraction analysis. The results show that variation of component phases trends towards the formation of nitrides rich in nitrogen and the increase of its content with the increase of N2 partial pressure, the variation tendency is αTi→ (αTi + Ti2N )→(Ti2N +TiN )→TiN. The effect of N2 partial pressure on the microhardness is mainly caused by that the N2 partial pressure effects the component phase of the coatings,while the microhardness of the coating made of two phases like TiN and Ti2N is the hardest.更多还原