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CVD与PVD硬涂层研究的进展
RECENT DEVELOPMENT OF HARD-COATINGS PRODUCED BY CVD AND PVD METHODS
【摘要】 论述了用CVD和PVD方法制备硬涂层的若干进展，包括MT-CVD，PACVD，HVS及IBAD等，并介绍了超硬涂层发展的简况。
【Abstract】 Some developments of hard-coatings produced by CVD and PVD methods aredescribed. The above mentioned developments include MT-CVD, PACVD, HVS, IBAD and etc.Furthermore, the developments of super-hard coatings are also briefly presented.
- 【文献出处】 上海金属 ,Shanghai Metals , 编辑部邮箱 ,1994年02期
- 【分类号】TG17
- 【被引频次】21
- 【下载频次】420