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侧面预电离氟化氪激光器研制
A 1/4 JKrF LASER WITH SIDE-PREIONIZATION
【摘要】 采用侧面紫外火花隙自动预电离代替小极上小孔预电离,使放电泵浦氟化氪激光器的主放电均匀性大为改善。输出激光能量由140mJ提高到250mJ,增益区光能密度为2.3J/1,同时电极寿命和气体寿命也大为提高。
【Abstract】 A discharge-pumped KrF laser is constructed.Preionization holes in the electrode surface are replaced by two raws of pins on the side of the electrode for ultraviolet autopreionlzation, resulting in a considerable improvement of main discharge uniformity and an increase of energy depletion. Laser output ranges from l40mJ to 25OmJ with the energy efficiency of 0.8%, and specific energy of2.3J/1.In addition,the lifetime of the gas and electrodes is also increased.
- 【文献出处】 强激光与粒子束 ,HIGH POWER LASER & PARTICLE BEAMS , 编辑部邮箱 ,1994年03期
- 【分类号】TN248.22
- 【下载频次】22