节点文献
区熔单晶硅生产操作指导专家系统
Study on Floating Zone Silicon Operation Guided Expert System
【摘要】 本文介绍区熔单晶硅生产操作指导专家系统。首先,系统实现了连续图象的自动变周期、定瞬间采样,并提出一种新的区域扩张增量图象处理算法.其次,叙述了知识的获取过程及类规则,提出分布的多库结构,并实现了不确定性推理.最后,开发了区熔单晶硅生产操作指导专家系统,实现了从数据和图象采集、处理、事实获取、推理到给出操作指导一体化。
【Abstract】 This paper introduces a floating zone monocrystalline silicon operation guided expert systesm.First, in the system the automatically changing sampling cycle and the automatic deciding snap instantaneity of succesive image have come to practice. A new image processing algorithm by gradually expanding area is proposed. Secondly, the process of acquiring and representing knowledge by rules is described, and a distributed multi-knowledge base structure is presented. And the uncertainty reasoning is realized. Finally,according to the reality of our country the real-time floating zone silicon operation guided expert system is built up. The automation ranging from data and image collection, processing and facts acquisition to the instruction of operation is realized.
【Key words】 floating zone; monocrystalline silicon; expert system; image processing;
- 【文献出处】 控制与决策 ,CONTROL AND DECISION , 编辑部邮箱 ,1994年01期
- 【分类号】TN304.120
- 【下载频次】153