【摘要】 在研制的大弧源多弧离子镀膜机内进行了沉积氮化钛工艺试验，研究了弧源施加磁控与否、氮分压、基板偏压和形成氮化钛时工件温度等工艺参数，对氮化钛涂层微观组织和性能的影响。更多还原

【Abstract】 The effect of application of magnetic control or not on are source,mitrogen partial pressure, bias voltage and temperature of substrate when TiN coating is formed on microstructure and properties of TiN films are investigated.更多还原