【摘要】 采用高功率ＣＯ２激光诱导高纯硅烷气相反应，制备出粉体平均粒径为１０～１２０ｕｍ，晶粒度与平均粒径比为０．３～０．７的各种纳米结晶硅粉。制备出的硅粉粒度均匀，粒子呈球形，但部分粒子间出现烧结。粉体粒径随激光功率、反应压力的增加而增加，随硅烷流量、稀释Ａｒ气的增加而减小。晶粒度对硅烷流量和反应压力的变化不敏感，但随激光功率的降低和混合Ａｒ气的增加而明显减小。Ｓｉ粒子的形成经历了单晶粒子的生长和这些粒子间的碰撞生长过程。更多还原

【Abstract】 High quality nanometric crystalline St powders were synthesized from high pureSiH4 by high powerful COZ laser induced gas phase reaction.The powders produCgd havespherical particle shape with uniform particle size, mean particle diameter of 10￣ 120 urn,and the ratio of mean grain and particle diameter between 0.3-0. 7. The sizes of thepowders increased with the increase of laser power, reaction pressure, but decreased with theincrease of silane gas flow rate and the addition of Ar diluent. Grain sizes dropped distinctlywith the rise of the addition of Ar gas and laser power, but changed little with the gas flowrate and reaction temperature. The formation of St particle undergoes the growth of singlecrystalline particles and the growth by the collision between these partieles.更多还原