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一种新型触针式曲面形貌测量系统

A New Stylus Measuring System for Curved Topography

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【作者】 蒋向前肖少军谢铁邦李柱

【Author】 Jiang Xiangqian; Xiao Shaojun; Xie Tiebang; Li Zhu

【机构】 华中理工大学测试技术与科学仪器研究中心

【摘要】 介绍一种用于曲面形貌特性的测量-分析系统。在触针技术的基础上,采用激光-光栅干涉和散斑干涉条纹微机细分技术并利用计算机图形学原理,解决高精度曲面表面形貌测量问题,讨论了系统工作原理、光电信号处理、软件设计及曲面数据处理模型,给出了初步实验结果。

【Abstract】 Anew stylus measuring system for curved topography is described. Laser-grating inter-ference is introduced into the stylus contour graph.Areflective cylindrical hologram diffu-sion (RCHD) grating is used as a standard device to obtain a wide dynamic range and inter-ferometric fringes with microcomputer division are used to give a high resolution. The newstylus system developed is capable of measuring curved surface topography and analyzing ac-curately all kinds of characteristicsprinciples,photoelectric signal processing,hardware andsoftware design and mathematical model of curved surface topography are discussed.Experi-mental results of typical curved surface topography. are given.

【基金】 国家自然科学基金
  • 【文献出处】 华中理工大学学报 ,JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY , 编辑部邮箱 ,1994年09期
  • 【分类号】TH741
  • 【被引频次】13
  • 【下载频次】182
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