【摘要】 介绍研制的１５ｃｍ双潘宁离子源等离子体产生器的结构和工作原理，研究了磁场、气压和弧功率等运行参数对源特性的影响，最后结合朗缪尔探针测量结果进行了讨论。该产生器的探针饱和离子流密度已达到２００ｍＡ／ｃｍ２以上，引出面附近的离子密度径向不均匀度＜±５％，噪声水平＜±１０％。更多还原

【Abstract】 In this paper,experimental results of 15 cm duoPIGatron plasma generator are brieflydescribed.Source characteristics as a function of the discharge parameters such as the magneticfields,gas pressure,and arc power(including the arc voltage and current)are studied.Some re-sults of langmuir probe measurement are given. This source has achieved ion current densities ofmore than 200mA/cm2,radial plasma density uniformities of less than ± 5 % over a 15 cmdiameter,and noise levels of less than ± 10%.更多还原