【摘要】 在ＰＡＮ碳布和沥青基体碳的Ｃ／Ｃ复合材料表面涂复了ＳｉＣ。用ＣＨ４和Ｎ，为载气的ＳｉＣｌ４作原料，用Ｈ２为稀释气，在两种气体混合比和三种温度下化学气相沉积ＳｉＣ涂层。分析表明，涂层的主要元素有Ｃ，Ｓｉ、Ｃｌ和微量Ｃａ。电镜观察表明，涂层中Ｃ原子含量为６２％时呈菜花状或云团状，而当Ｃ／Ｓｉ比接近于１时，表面呈菠萝状。更多还原

【Abstract】 SiC was coated on the surfaee of Carbon-Carbon composites prepared from the PAN carbon-cloth and pitch. CH4 and SiCl4 are used as raw material,N,as carrying gas for SiCl4 and H2 as dilution gas.CVD SiC coating is prepared with two kinds of ratio and three kinds of temperature.The main elements of coating are C, Si, Cl and traeed Ca from electronic probe,SEM observation revealed that, when the C content is 62%,the mornhology of SIC ap-pearance is cauliflower o:in cloud mass with poor oxidation resistance,and while C / Si ratio tends to l,the surfaee morphology is pineapple with increased oxidation resistanee. In addition,when the deposited temperature increases,the size of surfaee pellet becomes larger.更多还原