【摘要】 报道了硅片直接键合（ＳＤＢ）ＳＯＩ大截面单模脊形互型分支波导的研制．对于波长为１．３μｍ的光，在θ＝２°小分支角时，这种分支波导的通道串音小于－２０ｄＢ，辐射损耗小于０．３ｄＢ．直通传输损耗小于０．８５ｄＢ／ｃｍ．更多还原

【Abstract】 X type crossing waveguide structures constructed by large single-mode rib SOI(Silicon-on-insulator) waveguide have been fabricated. The SOI structure is formed bySDB (silicon wafer direct bonding) process. When crossing angle of the crossingwaveguides is equal to 2°, their crosstakles is below to-20 dB, their radiation losses isbelow to 0. 3 dB, and their propegstion losses of the direct channels are measured to beapptoximately 0. 85 dB/cm at a wavelength of 1. 3 μm.更多还原