【摘要】 在双层、异型硅外延中，通常采用预通掺杂剂二步外延法。本文对掺杂剂预通过程中产生的气一固扩散进行理论及实验研究，分析了预通条件（温度、时间、预通量等）对气一团扩散的影响，提出了减小Ｐ－Ｎ过渡区改进的二步外延法。更多还原

【Abstract】 The two-step way of pre-entering dopant was usually used for double-layer, heier-type Si epitaxial structure. In this paper, the gas-solid diffusion produced during the pre-entering dopant has been studied theoretically and experimentally. The effect of pre-entering conditions on the gas-solid diffusion has been analyzed. The Improved two-step way of dicreased P-N transition region is given.更多还原