【摘要】 本文介绍了用ｓｏｌ－ｇｅｌ方法制备ＰＺＴ铁电薄膜的工艺，并指出采用快速热处理工艺能有效地防止薄膜开裂。比较了用３种不同锆盐原料制备的ＰＺＴ薄膜的性能。实验结果表明，用无机盐硝酸锆制备的ＰＺＴ铁电薄膜的性能最好。更多还原

【Abstract】 This paper studied the sol-geltechnique to prepare PZT ferroelectric thin films,and pointed out that the adoption of rapid sinteringprocess could effectively prevent the thin films fromcracking. It compared the performances of the PZTthin films prepared with three different kinds ofzirconic salts.And the test result showed that thepe rformance of the PZT thin films prepared withinorganic Salt aitrate Zirconium was the best.更多还原