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用迈克尔逊干涉仪测量单层薄膜的厚度和折射率
THE THICKNESS AND REFACTURE INDEX OF SINGLELAYER FILM MEASURED BY MICHELSON INTERFEROMETER
【摘要】 薄膜厚度的测量是薄膜科学的重要分支之一,本文讨论用迈克尔逊干涉仪观察白光等厚彩色干涉条纹方法,从而确定薄膜的厚度和折射率,该方法的优点是测量精度高,原理简单,在一次测量过程中可同时确定薄膜的厚度和折射率。
【Abstract】 The measurent of film thickness is one of the important branches of film science.The paper discusses the method for observing color interference fringes of equivalent thickness of white light by using Michelson interferomter so that film thickness and refracture index are determined.The method has such advantages as high precision in measurement,simplicity in principles and the capability of determining film thiciness and refracture index in the meantime just in one measurement.
【关键词】 迈克尔逊干涉仪;
光程;
薄膜厚度;
折射率;
等厚干涉;
反射率;
【Key words】 Michelson interferometer; optical distance; film thickness; refracture index; equivalent thickness interference; reflectivity;
【Key words】 Michelson interferometer; optical distance; film thickness; refracture index; equivalent thickness interference; reflectivity;
- 【文献出处】 大学物理实验 ,PHYSICAL EXPERIMENT OF COLLEGE , 编辑部邮箱 ,1994年01期
- 【分类号】O484
- 【被引频次】16
- 【下载频次】1602