【摘要】 在追述以往的判断薄膜微结构的结构区模型（ｓｔｒｕｃｔｕｒｅｚｏｎｅｍｏｄｅｌｓ）的基础上，整理和介绍了国外最近提出的结构区模型。它是以离子复合参数Ｅ＿ｐ（由到达的离子带给凝聚粒子的平均能量ｅＶ／ａｔｏｍ）为参变量，衡量该参数对薄膜微结构及其特性的影响，对今后设计ＰＶＤ设备和更好地掌握工艺条件，将会是有益的。更多还原

【Abstract】 Physical vapor deposition(PVD)methods have found widespread appli-cation the deposition of hard coatings. In order to compare potential and limi-tations of the PVD methods, a good knowledge of the physical processes offilm growth, formation of various film microstructures, and the resultingproperties iS necessary. Here the latest advances in understanding the ef-fect of physical film growth parameter on the microstructure of growingfilms are reviewed.Examples of sputtered TiN film microstructure are given.A critical review of the structure zone models is presented.更多还原