【摘要】 在同一介质上，应用集成电路微细加工技术制作出尺寸在微米范畴的微机械部件，微传感器，微传动装置并将它们与微电子线路在一起形成高性能的闭环控制的微电子机械系统是一门新兴的边缘学科，也开辟了一个全新的工业加工领域，本文简述了微电子机械系统的研究现状及其基础技术。更多还原

【Abstract】 Fabricating micro-sized mechanical components,sensors,and actuatorswith IC fabrication technology and integrating them with electronics in thesame substrate to develop high-performance closed-loop-controlled miero-electromechanical systems is a new frontier science and it opens an entirelvnew industrial domain. The paper describes briefly the research status andbasic technology on Microelectromechnical Systems.更多还原